Model Name

AR-WV300-50

Structure

Cylindrical Coordinate

Moving Axes

4

Operating Range

A-axis

545mm

B-axis

545mm

θ-axis

330˚

Z-axis

50mm

Operating speed

A-axis

1000mm/sec

B-axis

1000mm/sec

θ-axis

216˚/s

Z-axis

75mm/s

Vacuum Seal Method

Mechanical lip-seal

Bellows-seal

Repeatability

±0.1mm

Cleanliness

Class 1(0.1㎛/cf)

Leak rate

1 × 10^-8(Pa·m³/s)

Payload

700g(Including the hand)

Operating Environment

Atmoshperic

Temp. : 0~40℃

Humid. : 70% under

Vacuum

Vacuum level : 1 × 10^-6Pa(7.5 x 10^-9 Torr)

Temp. : 0~80℃

Robot Weight

Approximately 70kg

Appearance

Atmospheric

Aluminium white Alumite

Vacuum

Aluminium(None surface finishing)