韩国三星晶圆机器人
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- 产品描述
Model Name
AR-S300R-300R
Structure
Cylindrical Coordinate
Moving Axes
3+1
Operating Range
A-axis
510mm
θ-axis
330˚
Z-axis
300mm
R-axis
183˚
Operating speed (MAX)
A-axis
600mm/sec
θ-axis
235˚/sec
Z-axis
150mm/sec
R-axis
300/s
Repeatability
±0.1mm
Cleanliness
Class 1(0.1㎛/cf)
Payload
500g (Including the hand)
Operating Environment
Temp. : 0~40℃
Humid. : 70% under
Robot Weight
Approximately 29kg
Appearance
Main body : Aluminium white Alumite, SUS buffing(#400)
Reverse : Teflon coating(Balck)
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