4.5G-5G玻璃基板搬运机器人
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产品名称:
4.5G-5G玻璃基板搬运机器人型号:
SV5G价格:
400000最小起订量:
1
产品摘要:
4.5G-5G真空中单臂搬运机器人, 4.5G-5G Transfer robot with single arm in Vacuum.
- 产品描述
Model Name
AR-SV5G-300
Structure
Cylindrical Coordinate
Moving Axes
3
Operating Range
A-axis
2240mm
θ-axis
Continuous
Z-axis
300mm
Operating speed (MAX)
A-axis
1200mm/sec
θ-axis
120°/s
Z-axis
120mm/s
Vacuum Seal Method
Mechanical lip-seal
Repeatability
±0.1mm
Cleanliness
Class 1(0.1㎛/cf)
Leak rate
1 x 10-7(Pa-m3/s)
Payload
15kg(Including the hand)
Operating Environment
Atmoshperic
Temp. : 0~40℃
Humid. : 70% under
Vaccum
Vacuum level : 1 x 10-5Pa
Temp. : 0-80℃
Robot Weight
Approximately 280Kg
Appearance
Atomoshperic
Aluminium with Alumite
Vacuum
Aluminium(None surface finishing)
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